NF EN ISO 14644-10
Cleanrooms and associated controlled environments - Part 10 : classification of surface cleanliness by chemical concentration
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
<p>This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.</p> <p>NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.</p> <p>NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.</p>
- Avant-proposiv
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1 Domaine d'application1
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2 Références normatives1
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3 Termes et définitions1
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4 Classification2
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4.1 Principes d'établissement de la classification de la propreté chimique des surfaces dans les salles propres et environnements contrôlés2
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4.2 Classification de la propreté des surfaces par la concentration en chimiques2
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4.3 Désignation ISO-SCC4
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4.4 Conversions en concentration atomique par unité de surface4
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5 Mesurer et surveiller la propreté des surfaces par rapport à la contamination chimique et démontrer la conformité5
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5.1 Critères d'évaluation de la propreté5
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5.2 Documentation et rapport6
- Annexe A (informative) Conversion entre différentes unités d'expression de la concentration surfacique des substances chimiques8
- Annexe B (informative) Paramètres influençant les essais et l'interprétation des résultats15
- Annexe C (informative) Considérations essentielles pour une évaluation correcte de la propreté.16
- Annexe D (informative) Méthodes de détermination de la propreté chimique de surface18
- Annexe E (informative) Documentation relative à l'enregistrement des essais31
- Bibliographie32
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