NF EN ISO 14644-3
Cleanrooms and associated controlled environments - Part 3 : test methods
ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.
ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.
ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.
<p>This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.</p> <p>Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.</p> <p>The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.</p> <p>For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.</p> <p>This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.</p> <p>NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.</p>
- Avant-proposiv
- Introductionv
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1 Domaine d'application1
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2 Références normatives1
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3 Termes et définitions2
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3.1 Généralités2
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3.2 Mesurage des particules en suspension dans l'air2
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3.3 Filtres à air et systèmes de filtration4
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3.4 Débit d'air et autres états physiques5
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3.5 Mesurage des phénomènes électrostatiques6
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3.6 Appareils de mesure et conditions de mesurage6
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3.7 États d'occupation8
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4 Modes opératoires d'essai8
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4.1 Essais de salle propre8
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4.2 Principe9
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5 Rapports d'essai11
- Annexe A (informative) Sélection des essais recommandés pour une installation et de l'ordre dans lequel il convient de les effectuer12
- Annexe B (informative) Méthodes d'essai17
- Annexe C (informative) Appareils d'essai53
- Bibliographie66
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