NF EN ISO 14644-8
Cleanrooms and associated controlled environments - Part 8 : classification of air cleanliness by chemical concentration (ACC)
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification. ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions. ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants. ISO 14644-8:2013 does not give a classification of surface chemical contamination.
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.
ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.
ISO 14644-8:2013 does not give a classification of surface chemical contamination.
Le présent document traite de la classification de la contamination moléculaire aéroportée (AMC) dans les salles propres et les environnements maîtrisés apparentés, en termes de concentrations dans l'air de substances chimiques spécifiques (individu, groupe ou catégorie), et fournit un protocole permettant d'intégrer les méthodes d'essai, l'analyse et les facteurs de pondération dans le temps, dans la spécification en vue d'une classification.
<p>This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 10<sup>0</sup> g/m<sup>3</sup> and 10<sup>−12</sup> g/m<sup>3</sup> under cleanroom operational conditions.</p> <p>This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.</p> <p>It is not the intention of this document to describe the nature of air chemical contaminants.</p> <p>This document does not give a classification of surface chemical contamination.</p>
- Avant-proposiv
- Introductionv
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1 Domaine d'application1
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2 Références normatives1
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3 Termes et définitions1
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3.1 Généralités1
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3.2 Catégories de contaminants2
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4 Classification3
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4.1 Généralités3
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4.2 Format du descripteur ISO-ACC3
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5 Démonstration de la conformité5
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5.1 Principe5
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5.2 Essais5
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5.3 Rapport d'essai6
- Annexe A (informative) Paramètres à prendre en compte7
- Annexe B (informative) Contaminants types11
- Annexe C (informative) Méthodes de mesure types15
- Annexe D (informative) Exigences spécifiques à prendre en compte pour les dispositifs séparatifs19
- Bibliographie21
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