NF ISO 14594
Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume. ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.
ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume.
ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.
- Avant-proposiv
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1 Domaine d'application1
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2 Références normatives1
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3 Termes et définitions1
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4 Abréviations2
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5 Paramètres expérimentaux2
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5.1 Généralités2
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5.2 Paramètres liés au faisceau primaire2
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5.3 Paramètres liés aux spectromètres à dispersion de longueur d'onde3
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5.4 Paramètres liés à l'échantillon5
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6 Modes opératoires et mesures5
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6.1 Généralités5
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6.2 Courant de faisceau5
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6.3 Paramètres liés aux pics mesurés6
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6.4 Paramètres liés à l'échantillon9
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7 Rapport d'essai9
- Annexe A (informative) Méthodes d'estimation de l'aire d'analyse11
- Annexe B (informative) Méthodes d'estimation de la profondeur d'analyse13
- Annexe C (informative) Méthode d'estimation du volume analysé par simulation de Monte-Carlo (MC)14
- Bibliographie18
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