ISO 11505:2012

Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.

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