JIS C 5630-26

JIS C 5630-26

October 2017
Standard Current

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

Main informations

Collections

JIS japanese standards

Publication date

October 2017

Number of pages

24 p.

Reference

JIS C 5630-26

ICS Codes

31.080.01   Semiconductor devices in general
31.220.01   Electromechanical components in general

International kinship

IEC 62047-26:2016
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