NF ISO 17973

NF ISO 17973

April 2006
Standard Current

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

ISO 17973:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

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Main informations

Collections

National standards and national normative documents

Publication date

April 2006

Number of pages

17 p.

Reference

NF ISO 17973

ICS Codes

71.040.40   Chemical analysis

Classification index

X21-054

Print number

1 - 24/03/2006

International kinship

ISO 17973:2002
Sumary
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

ISO 17973:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Table of contents
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  • Avant-propos
    iv
  • Introduction
    v
  • 1 Domaine d'application
    1
  • 2 Références normatives
    1
  • 3 Termes et définitions
    1
  • 4 Symboles et termes abrégés
    1
  • 5 Aperçu de la méthode
    2
  • 6 Procédures d'étalonnage de l'échelle d'énergie
    3
  • 6.1 Obtention des échantillons de référence
    3
  • 6.2 Montage des échantillons
    3
  • 6.3 Nettoyage des échantillons
    3
  • 6.4 Choix des réglages du spectromètre pour l'étalonnage de l'énergie
    5
  • 6.5 Fonctionnement de l'instrument
    5
  • 6.6 Mesurage des pics de référence
    6
  • 6.7 Détermination des énergies cinétiques mesurées des pics de référence
    8
  • 6.8 Détermination de la correction de l'échelle d'énergie cinétique de l'instrument
    8
  • 6.9 Étalonnage suivant
    9
  • Bibliographie
    11
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