IEC 62047-17:2015

IEC 62047-17:2015

March 2015
International standard Current

Semiconductor devices - Micro-electromechanical devices - Part 17 : bulge test method for measuring mechanical properties of thin films

Main informations

Collections

International IEC standards

Publication date

March 2015

Number of pages

54 p.

Reference

IEC 62047-17:2015

ICS Codes

31.080.99   Other semiconductor devices

Print number

1
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