IEC PAS 62276:2001
Single crystal wafers applied for surface acoustic wave device - Specification and measuring method
Applies to single crystal wafers intended for manufacturing substrates made of synthetic quartz crystal, lithium niobate, lithium tantalate, lithium tetraborate crystals for surface acoustic wave (SAW) filters and resonators. Lays down specifications and measuring methods.
Applies to single crystal wafers intended for manufacturing substrates made of synthetic quartz crystal, lithium niobate, lithium tantalate, lithium tetraborate crystals for surface acoustic wave (SAW) filters and resonators. Lays down specifications and measuring methods.
Provides specifications for manufacturing piezoelectric single crystal wafers to be used in surface acoustic wave devices. Applies to the manufacture of synthetic quartz, lithium niobate, lithium tantalate, lithium tetraborate, and lanthanum gallium silicate single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave filters and resonators.
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