ISO 14644-15:2026
ISO 14644-15:2026

ISO 14644-15:2026

May 2026
International standard Current

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).This document does not apply to the following:health and safety requirements;compatibility with cleaning agents and techniques;cleanability;biocontamination;specific requirements of equipment and materials for processes and products;design details of equipment.

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Main informations

Collections

International ISO standards

Publication date

May 2026

Number of pages

22 p.

Reference

ISO 14644-15:2026

ICS Codes

13.040.35   Cleanrooms and associated controlled environments

Print number

2
Sumary
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

  • health and safety requirements;
  • compatibility with cleaning agents and techniques;
  • cleanability;
  • biocontamination;
  • specific requirements of equipment and materials for processes and products;
  • design details of equipment.
Replaced standards (1)
ISO 14644-15:2017
ISO 14644-15:2017
October 2017
International standard Current
Cleanrooms and associated controlled environments - Part 15 : Assessment of suitability for use of equipment and materials by airborne chemical concentration

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8). The following are outside the scope of ISO 14644-15:2017: - health and safety requirements; - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment.

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