This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.
This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.
To comply with a standard, you need to quickly understand its issues in order to determine its impact on your activity.
The Requirements department helps you quickly locate within the normative text:
The identification of these types of clauses is based on the document "ISO/IEC Directives, Part 2 - Principles and rules of structure and drafting of ISO documents" as well as on a constantly enriched list of verbal forms.
With Requirements, quickly access the main part of the normative text!
COBAZ is the simple and effective solution to meet the normative needs related to your activity, in France and abroad.
Available by subscription, CObaz is THE modular solution to compose according to your needs today and tomorrow. Quickly discover CObaz!
Request your free, no-obligation live demo
I discover COBAZ