ISO 27911:2011

Surface chemical analysis - Scanning-probe microscopy - Definition and calibration of the lateral resolution of a near-field optical microscope

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.

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