This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
ISO/TR 14999-2:2005 gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
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