NF EN 62047-3

Semiconductor devices - Micro-electromechanical devices - Part 3 : thin film standard test piece for tensile testing

Le présent document spécifie une éprouvette d'essai normalisée, qui est utilisée pour garantir le bien-fondé et la précision du système d'essais de traction pour les matériaux en couche mince avec une longueur et une largeur inférieures à 1 mm et une épaisseur inférieure à 10 micro m, et qui sont des matériaux de structure principaux pour les systèmes microélectromécaniques (MEMS), les micromachines et dispositifs analogues.

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