NF EN ISO 25178-605

Geometrical product specifications (GPS) - Surface texture: Areal - Part 605 : design and characteristics of non-contact (point autofocus probe) instruments

This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

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