NF ISO 23830
Surface chemical analysis - Secondary-ion mass spectrometry - Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry
ISO 23830:2008 specifies a method for confirming the repeatability and constancy of the positive-ion relative-intensity scale of static secondary-ion mass spectrometers, for general analytical purposes. It is only applicable to instruments that incorporate an electron gun for charge neutralization. It is not intended to be a calibration of the intensity/mass response function. That calibration may be made by the instrument manufacturer or another organization. The present method provides data to confirm the constancy of relative intensities with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.
ISO 23830:2008 specifies a method for confirming the repeatability and constancy of the positive-ion relative-intensity scale of static secondary-ion mass spectrometers, for general analytical purposes. It is only applicable to instruments that incorporate an electron gun for charge neutralization. It is not intended to be a calibration of the intensity/mass response function. That calibration may be made by the instrument manufacturer or another organization. The present method provides data to confirm the constancy of relative intensities with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.
- Avant-proposiv
- Introductionv
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1 Domaine d'application1
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2 Symboles et termes abrégés1
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3 Aperçu de la méthode2
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4 Méthode permettant de confirmer la répétabilité et la constance de l'échelle des intensités4
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4.1 Obtention de l'échantillon de référence4
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4.2 Préparation du montage de l'échantillon4
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4.3 Montage de l'échantillon4
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4.4 Choix des réglages du spectromètre pour lesquels la stabilité de l'intensité doit être déterminée4
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4.5 Fonctionnement de l'instrument4
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4.6 Mesurages de l'intensité et sa répétabilité6
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4.7 Calcul de la répétabilité des intensités7
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4.8 Mode opératoire de détermination régulière de la constance de l'échelle des intensités relatives9
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4.9 Étalonnage suivant11
- Annexe A (informative) Exemples de conditions de fonctionnement appropriées pour la SIMS statique12
- Bibliographie13
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