NF ISO 24236
Surface chemical analysis - Auger electron spectroscopy - Repeatability and constancy of intensity scale
ISO 24236:2005 specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
ISO 24236:2005 specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
- Avant-proposiv
- Introductionv
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1 Domaine d'application1
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2 Symboles1
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3 Aperçu de la méthode2
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4 Méthode d'évaluation de la répétabilité et de la constance de l'échelle d'intensité4
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4.1 Obtention de l'échantillon de référence4
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4.2 Montage de l'échantillon4
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4.4 Choix des réglages du spectromètre pour lesquels la stabilité de l'intensité doit être déterminée4
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4.5 Fonctionnement de l'instrument5
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4.6 Options pour les mesures d'évaluation initiales ou ultérieures6
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4.7 Mesures de l'intensité et de la répétabilité6
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4.8 Calcul des intensités des pics, des rapports d'intensité et des incertitudes8
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4.9 Procédure d'évaluation régulière de la constance de l'échelle d'intensité9
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4.10 Évaluation suivante11
- Annexe A (informative) Exemple de calculs et de mesures de la répétabilité de l'intensité pour un spectromètre d'électrons Auger commercial12
- Bibliographie16
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