NF ISO 29081

NF ISO 29081

April 2010
Standard Current

Surface chemical analysis - Auger electron spectroscopy - Reporting of methods used for charge control and charge correction

ISO 29081:2010 specifies the minimum amount of information required for describing the methods of charge control in measurements of Auger electron transitions from insulating specimens by electron-stimulated Auger electron spectroscopy and to be reported with the analytical results. Information is provided in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach. Some methods will be applicable to most instruments, others require special hardware, others might involve remounting the specimen or changing it. A similar International Standard has been published for X‑ray photoelectron spectroscopy (ISO 19318).

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Main informations

Collections

National standards and national normative documents

Publication date

April 2010

Number of pages

33 p.

Reference

NF ISO 29081

ICS Codes

71.040.40   Chemical analysis

Classification index

X21-068

Print number

1 - 22/04/2010

International kinship

ISO 29081:2010
Sumary
Surface chemical analysis - Auger electron spectroscopy - Reporting of methods used for charge control and charge correction

ISO 29081:2010 specifies the minimum amount of information required for describing the methods of charge control in measurements of Auger electron transitions from insulating specimens by electron-stimulated Auger electron spectroscopy and to be reported with the analytical results. Information is provided in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach. Some methods will be applicable to most instruments, others require special hardware, others might involve remounting the specimen or changing it. A similar International Standard has been published for X‑ray photoelectron spectroscopy (ISO 19318).

Table of contents
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  • Avant-propos
    v
  • Introduction
    VI
  • 1 Domaine d'application
    1
  • 2 Références normatives
    1
  • 3 Termes et définitions
    1
  • 4 Symboles et termes abrégés
    1
  • 5 Appareillage
    2
  • 5.1 Technique du contrôle de charge
    2
  • 5.2 Appareillage spécial
    2
  • 5.3 Montage et préparation de l'échantillon
    3
  • 5.4 Étalonnage de l'instrument
    3
  • 6 Description des informations relatives au contrôle de charge
    3
  • 6.1 Méthodes de contrôle de charge
    3
  • 6.2 Raisons d'un recours au contrôle de charge et choix de la méthode
    3
  • 6.3 Informations concernant l'échantillon
    3
  • 6.4 Valeurs des paramètres expérimentaux
    4
  • 6.5 Informations concernant l'efficacité des méthodes de contrôle de charge
    5
  • 7 Description de la ou des méthodes utilisées pour la correction de charge et de la valeur de cette correction
    5
  • 7.1 Méthodes de correction de charge
    5
  • 7.2 Approche
    5
  • 7.3 Valeur de l'énergie de correction
    5
  • Annexe A (informative) Description des méthodes de contrôle de charge en spectroscopie des électrons Auger
    6
  • A.1 Introduction
    6
  • A.2 Tableau hiérarchique des méthodes destinées à réduire l'effet de charge
    7
  • A.3 Méthodes destinées à minimiser l'effet de charge au cours d'une analyse par AES
    9
  • A.4 Considérations relatives aux échantillons fortement non uniformes, aux fibres et aux particules et à l'utilisation du profilage en profondeur par pulvérisation
    15
  • A.5 Considérations générales concernant l'accumulation de charge au cours d'une analyse par AES
    17
  • Bibliographie
    23
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