NF EN ISO 14644-3

NF EN ISO 14644-3

March 2006
Standard Cancelled

Cleanrooms and associated controlled environments - Part 3 : test methods

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

View the extract
Main informations

Collections

National standards and national normative documents

Publication date

March 2006

Number of pages

75 p.

Reference

NF EN ISO 14644-3

ICS Codes

13.040.35   Cleanrooms and associated controlled environments

Classification index

X44-103

Print number

1 - 01/03/2006

International kinship

European kinship

EN ISO 14644-3:2005
Sumary
Cleanrooms and associated controlled environments - Part 3 : test methods

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.

ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Standard replaced by (1)
NF EN ISO 14644-3
October 2019
Standard Current
Cleanrooms and associated controlled environments - Part 3 : test methods

<p>This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.</p> <p>Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.</p> <p>The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.</p> <p>For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.</p> <p>This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.</p> <p>NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.</p>

Table of contents
View the extract
  • Avant-propos
    iv
  • Introduction
    v
  • 1 Domaine d'application
    1
  • 2 Références normatives
    1
  • 3 Termes et définitions
    2
  • 3.1 Généralités
    2
  • 3.2 Mesurage des particules en suspension dans l'air
    2
  • 3.3 Filtres à air et systèmes de filtration
    4
  • 3.4 Débit d'air et autres états physiques
    5
  • 3.5 Mesurage des phénomènes électrostatiques
    6
  • 3.6 Appareils de mesure et conditions de mesurage
    6
  • 3.7 États d'occupation
    8
  • 4 Modes opératoires d'essai
    8
  • 4.1 Essais de salle propre
    8
  • 4.2 Principe
    9
  • 5 Rapports d'essai
    11
  • Annexe A (informative) Sélection des essais recommandés pour une installation et de l'ordre dans lequel il convient de les effectuer
    12
  • Annexe B (informative) Méthodes d'essai
    17
  • Annexe C (informative) Appareils d'essai
    53
  • Bibliographie
    66
ZOOM ON ... the Requirements department
To comply with a standard, you need to quickly understand its issues in order to determine its impact on your activity.

The Requirements department helps you quickly locate within the normative text:
- mandatory clauses to satisfy,
- non-essential but useful clauses to know, such as permissions and recommendations.

The identification of these types of clauses is based on the document “ISO / IEC Directives, Part 2 - Principles and rules of structure and drafting of ISO documents ”as well as on a constantly enriched list of verbal forms.

With Requirements, quickly access the main part of the normative text!

With Requirements, quickly access the main part of the normative text!
Need to identify, monitor and decipher standards?

COBAZ is the simple and effective solution to meet the normative needs related to your activity, in France and abroad.

Available by subscription, CObaz is THE modular solution to compose according to your needs today and tomorrow. Quickly discover CObaz!

Request your free, no-obligation live demo

I discover COBAZ