NF EN ISO 25178-603

NF EN ISO 25178-603

December 2013
Standard Cancelled

Geometrical product specifications (GPS) - Surface texture : areal - Part 603 : nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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Main informations

Collections

National standards and national normative documents

Publication date

December 2013

Number of pages

38 p.

Reference

NF EN ISO 25178-603

ICS Codes

17.040.20   Properties of surfaces
17.040.40   Geometrical Product Specification (GPS)

Classification index

E05-031-603

Print number

1 - 22/11/2013

International kinship

ISO 25178-603:2013

European kinship

EN ISO 25178-603:2013
Sumary
Geometrical product specifications (GPS) - Surface texture : areal - Part 603 : nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Table of contents
  • Avant-propos
    iv
  • Introduction
    vi
  • 1 Domaine d'application
    1
  • 2 Termes et définitions
    1
  • 2.1 Termes et définitions liés à toutes les méthodes de mesure de l'état de surface surfacique
    1
  • 2.2 Termes et définitions liés aux systèmes de balayage x et y
    8
  • 2.3 Termes et définitions liés aux systèmes optiques
    10
  • 2.4 Termes et définitions liés aux propriétés optiques de la pièce
    12
  • 2.5 Termes et définitions spécifiques à la microscopie interférométrique à glissement de franges
    12
  • 3 Descriptions des grandeurs d'influence
    13
  • 3.1 Généralités
    13
  • 3.2 Grandeurs d'influence
    14
  • Annexe A (informative) Composants d'un microscope interférométrique à glissement de franges (PSI)
    16
  • Annexe B (informative) Principe de fonctionnement d'un microscope interférométrique à glissement de franges (PSI)
    17
  • Annexe C (informative) Erreurs et corrections des microscopes interférométriques à glissement de franges (PSI)
    22
  • Annexe D (informative) Relation avec la matrice GPS
    25
  • Bibliographie
    27
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