NF EN ISO 25178-604

NF EN ISO 25178-604

September 2013
Standard Current

Geometrical product specification (GPS) - Surface texture : areal - Part 604 : nominal characteristics of non-contact (coherence scanning interferometry) instruments

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

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Main informations

Collections

National standards and national normative documents

Publication date

September 2013

Number of pages

52 p.

Reference

NF EN ISO 25178-604

ICS Codes

17.040.20   Properties of surfaces
17.040.40   Geometrical Product Specification (GPS)

Classification index

E05-031-604

Print number

1 - 11/09/2013

International kinship

ISO 25178-604:2013

European kinship

EN ISO 25178-604:2013
Sumary
Geometrical product specification (GPS) - Surface texture : areal - Part 604 : nominal characteristics of non-contact (coherence scanning interferometry) instruments

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Table of contents
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  • Avant-propos
    iv
  • Introduction
    vi
  • 1 Domaine d'application
    1
  • 2 Termes et définitions
    1
  • 2.1 Termes et définitions relatifs à toutes les méthodes de mesure de l'état de surface surfacique
    1
  • 2.2 Termes et définitions relatifs aux systèmes de scanning suivant x et y
    6
  • 2.3 Termes et définitions relatifs aux systèmes optiques
    8
  • 2.4 Termes et définitions relatifs aux propriétés optiques de la pièce
    10
  • 2.5 Termes et définitions spécifiques aux microscopes interférométriques par balayage à cohérence
    10
  • 3 Descriptions des grandeurs d'influence
    14
  • 3.1 Généralités
    14
  • 3.2 Grandeurs d'influence
    14
  • Annexe A (informative) Vue d'ensemble et composants du microscope interférométrique par balayage à cohérence (CSI)
    17
  • Annexe B (informative) Théorie du fonctionnement de l'interférométrie par balayage à cohérence (CSI)
    22
  • Annexe C (informative) Résolution spatiale
    32
  • Annexe D (informative) Exemple de procédure d'estimation de la répétabilité de la topographie de surface
    37
  • Annexe E (informative) Relation avec la matrice GPS
    38
  • Bibliographie
    40
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