NF EN ISO 25178-607

NF EN ISO 25178-607

April 2019
Standard Current

Geometrical product specifications (GPS) - Surface texture : Areal - Part 607 : nominal characteristics of non-contact (confocal microscopy) instruments

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

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Main informations

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National standards and national normative documents

Publication date

April 2019

Number of pages

32 p.

Reference

NF EN ISO 25178-607

ICS Codes

17.040.20   Properties of surfaces
17.040.40   Geometrical Product Specification (GPS)

Classification index

E05-031-607

Print number

1

International kinship

ISO 25178-607:2018

European kinship

EN ISO 25178-607:2019
Sumary
Geometrical product specifications (GPS) - Surface texture : Areal - Part 607 : nominal characteristics of non-contact (confocal microscopy) instruments

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

Table of contents
  • 1 Domaine d'application
  • 2 Références normatives
  • 3 Termes et définitions
  • 4 Descriptions des grandeurs d'influence
  • Annexe A Classification des techniques de balayage dans le planpour les microscopes confocaux
  • Annexe B Théorie de fonctionnement des microscopes confocaux
  • Annexe C Mesurages de couches minces et de couches épaisses avec des microscopes confocaux
  • Annexe D Relation avec le modèle de matrice GPS
  • Bibliographie
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