NF EN 62276

Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods

Le présent document s''applique à la fabrication de tranches monocristallines de quartz synthétique, de niobate de lithium (LN) , de tantalate de lithium (LT) , de tétraborate de lithium (LBO) et de silicate de gallium et de lanthane (LGS) destinées à être utilisées comme substrats dans la fabrication de résonateurs et de filtres à ondes acoustiques de surface (OAS) .

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