NF EN ISO 14644-10

NF EN ISO 14644-10

May 2022
Standard Current

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

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Main informations

Collections

National standards and national normative documents

Publication date

May 2022

Number of pages

38 p.

Reference

NF EN ISO 14644-10

ICS Codes

13.040.35   Cleanrooms and associated controlled environments

Classification index

X44-101-10

Print number

1

International kinship

ISO 14644-10:2022

European kinship

EN ISO 14644-10:2022
Sumary
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.

NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Replaced standards (1)
NF EN ISO 14644-10
April 2013
Standard Cancelled
Cleanrooms and associated controlled environments - Part 10 : classification of surface cleanliness by chemical concentration

<p>ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.</p>

Table of contents
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  • Avant propos
  • 1 Domaine d'application
  • 2 Références normatives
  • 3 Termes et définitions
  • 4 Évaluation des niveaux chimiques de surface
  • 5 Mesurer la propreté des surfaces par rapport à la contamination chimique et démontrer la conformité aux exigences de niveau
  • Annexe A (informative) Conversion entre différentes unités d'expression de la concentration surfacique des substances chimiques
  • Annexe B (informative) Paramètres influençant les essais et l'interprétation des résultats
  • Annexe C (informative) Considérations essentielles pour une évaluation correcte de la propreté
  • Annexe D (informative) Méthodes de détermination de la propreté chimique de surface
  • Annexe E (informative) Documentation relative à l'enregistrement des essais
  • Bibliographie
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